The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precisi......
● Long life linear motion guide bearing system
● Ultra-fine resolution
● Integral bellows waycovers
● Low-profile compact design
● Includes brushless, slotless motor
Outstanding Construction Features
ATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.
ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.
All ATS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.
Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.
High Accuracy
The ATS100 sets the standard for precision performance in a compact package. With the HALAR option, the ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 μm.
Motors and Drives
Included with the ATS100 series stages are Aerotech BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
Options
Standard options include a precision right-angle bracket for multi-axis assembly and vacuum preparation to 10-6 torr.
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