The demａnd for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed ......
● Large, clear aperture
● Travel range from 100 mm x 100 mm to 400 mm x 400 mm
● High-performance linear motion guides
● 15 arc sec orthogonality
● Noncontact linear encoder for high accuracy
Design and Construction
Unlike other designs that are assembled from several discrete pieces, the ATS3600 is a three-piece design. This allows critical components such as orthogonality, straightness and flatness to be controlled during the initial machining, resulting in a stage with exceptional geometrical tolerances and inherent orthogonality.
The ATS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ATS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity and extremely low friction.
The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ATS3600 represents a major upgrade in performance over typical side-drive stages.
Motors and Drives
The ATS3600 includes two high-performance NEMA 23 BMS series brushless, slotless motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for the ultimate in smooth motion.
Optional Linear Encoder Feedback
A high-resolution, noncontact linear encoder is available as an option. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available. The digital version has a resolution of 1 µm, while the analog version, when coupled with an Aerotech multiplier box, can reach resolutions of 20 nm.
Alternate Configurations
All stage travels offer both single- and dual-axis designs, as well as the option for a solid tabletop. For the ultimate in performance, a linear motor version is available – please refer to ALS3600.
會(huì)員1.png)
合作市|
自治县|
株洲县|
宣恩县|
新乐市|
江安县|
响水县|
津南区|
开化县|
饶河县|
商水县|
普定县|
墨脱县|
高尔夫|
江川县|
溧阳市|
黄山市|
台前县|
武山县|
达拉特旗|
永仁县|
汝阳县|
五指山市|
德清县|
卢氏县|
佳木斯市|
乳山市|
长治县|
缙云县|
大邑县|
普安县|
南宫市|
渝中区|
普陀区|
韶关市|
胶南市|
山东|
柳州市|
重庆市|
浮山县|
九龙坡区|