詳細介紹
- 用途及特點
Use and Features
●適應于玻璃、塑膠等基片上鍍制各類光學薄膜和其它機能性裝飾薄膜的批量化生產(chǎn)
●采用******的電氣控制系統(tǒng),良好的用戶操作界面,大大減輕作業(yè)人員的負擔
●RCS自動鍍膜控制系統(tǒng)******整個鍍膜過程自動完成
●基片架轉動采用磁流體密封技術******真空密封,中心驅動方式******薄膜產(chǎn)品的均勻性及重復性
●優(yōu)化的配置、嚴格的品質控制******產(chǎn)品質量的穩(wěn)定性和重復性
●排氣速率.鍍膜效率的提高,大大縮短了產(chǎn)品生產(chǎn)周期
GFC系列高性能全自動真空鍍膜機
Series GFC High Quality Vacuum Thin Film Coater
技術參數(shù)
Technical parameters
Series GFC High Quality Vacuum Thin Film Coater
技術參數(shù)
Technical parameters
| 真空室體 Vacuum chamber | Ø1300*1450mm,SUS304材質 φ1,300*1,450mm,SUS304 material |
| 排氣系統(tǒng) Air exhaust system | KT-500擴散泵2臺,總排氣速率(加載水冷阱)11,000Pa.L/S Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S; |
| 極限真空≤2.0E-4Pa;排氣時間≤15min(大氣→4.0E-3Pa) Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa) | |
| 基片架 Substrate holder | Ø1200四葉扇形基片架, 3~30rpm轉速;可選配行星基片架、翻轉機構等 φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched; |
| 加熱機構 Heating means | ******350℃,PID控制;恒溫20min后溫度均勻性250±10℃ Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control; |
| 石英監(jiān)控儀 Quartz monitor | 進口石英晶體膜厚監(jiān)控儀;2點(或6點)晶振探頭 Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe; |
| 電子束蒸發(fā)源 Electron beam evaporation source | 10KW電子槍 2臺,12點坩堝和環(huán)形坩堝 Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible; |
| 電阻蒸發(fā)源 Resistance evaporation source | 功率4KW(一對、兩對或多對) Power of 4KW (one pair, two pairs or more pairs) |
| 膜厚修正板 Film depth correction board | 2個自動可倒式膜厚修正機構 Two automatic film depth correction mechanisms of collapsible type |
| 反應氣體 Reaction gas | APC自動壓強控制儀,質量流量計 APC automatic pressure controller, mass flowmeter |
| 離子源 Ion source | 可選配Kafman、Holl或RF離子源 Available for matching of Kafman, Holl or RF ion source |
| 低溫抽氣裝置 Low temperature evacuating equipment | 進口低溫抽氣裝置有效捕集水蒸汽,******溫度-130℃ The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃ |
| RCS系統(tǒng) RCS system | 基于WINDOWS的全自動鍍膜軟件 Windows-based full automatic coating software |
| 控制系統(tǒng) Control system | 控制柜(液晶觸摸式彩色顯示器),遠程控制遙控盒 Control cabinet (with liquid crystal color touch screen), remote-control box for remote control |
| 消耗能源 Energy consumption | 3相,220/380VAC,50Hz;~70KVA Three-phase, 220/380VAC,50Hz;~70KVA |
| 水流量140L/min,壓力0.3~0.5MPa Water flow 140L/min, pressure 0.3~0.5MPa | |
| 壓縮空氣0.5MPa~0.7MPa Compressed air 0.5MPa~0.7MPa | |
| 重 量 Weight | 凈重約4500Kg Net weight about 4,500 Kg |
| 安裝空間 Installation space | W4000mmxD6000mmxH2700mm W4,000mm×D6,000mm×H2,700mm |
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