主要特性與技術(shù)指標(biāo)

沒有線路負(fù)載效應(yīng)的真正脈沖/瞬態(tài)測(cè)量解決方案

整合了任意波形生成和高速 IV 測(cè)量功能

利用是德科技的動(dòng)態(tài) SMU 技術(shù)，消除了線路負(fù)載效應(yīng)，確保進(jìn)行準(zhǔn)確的脈沖 IV 測(cè)量

解決方案支持超快速 IV（電流-電壓）測(cè)量、脈沖 IV 測(cè)量和瞬態(tài) IV 測(cè)量，例如 NBTI/PBTI 和 RTN（隨機(jī)電報(bào)信號(hào)噪聲）測(cè)量等

測(cè)量功能

直流輸出和任意波形生成，具有 10 ns 的可編程分辨率（10V 峰-峰值輸出）

高速電壓/電流測(cè)量（200 MSa/s，5ns 采樣率）

任意波形輸出的動(dòng)態(tài)范圍可以調(diào)整，實(shí)現(xiàn)更寬廣的電流范圍

雙通道輸出

描述

是德科技設(shè)計(jì)的高速 SMU 技術(shù)可以擺脫線路負(fù)載效應(yīng)的影響，進(jìn)行更準(zhǔn)確的脈沖和瞬態(tài)測(cè)量

超快速 IV、脈沖 IV 和瞬態(tài) IV 測(cè)量正逐漸成為研發(fā)下一代半導(dǎo)體、器件和材料時(shí)的一項(xiàng)常見要求。Keysight B1500A 系列中的 Keysight B1530A 波形發(fā)生器/快速測(cè)量單元（WGFMU）是用于上述時(shí)間相關(guān)測(cè)量的理想測(cè)量模塊。這些測(cè)量通常是由脈沖發(fā)生器和示波器共同完成，然而線路負(fù)載效應(yīng)（剩余電阻導(dǎo)致的壓降誤差）會(huì)對(duì)測(cè)量準(zhǔn)確性產(chǎn)生不利影響。B1530A WGFMU 結(jié)合了任意波形生成和同時(shí)執(zhí)行高速測(cè)量的功能，而是德科技的動(dòng)態(tài) SMU 技術(shù)則可以消除線路負(fù)載效應(yīng)，因此與基于脈沖發(fā)生器的解決方案相比，它可使用戶執(zhí)行更準(zhǔn)確、更靈敏的測(cè)量。這個(gè)解決方案功能非常*，十分適合執(zhí)行高精度、超快速的 IV 測(cè)量、脈沖 IV 測(cè)量和瞬態(tài) IV 測(cè)量，例如超快速 NBTI 和 RTN 測(cè)量。

Main features and technical indicators

Real pulse/transient measurement solutions without line load effects

Integration of arbitrary waveform generation and high-speed IV measurement function

The SMU technology, which is unique to DE tech, eliminates line load effects and ensures accurate pulse IV measurements

The solution supports ultra-fast IV (current-voltage) measurements, impulse IV measurements, and transient IV measurements, such as NBTI/PBTI and RTN (random telegraph signal noise) measurements

Measurement functions

Dc output and arbitrary waveform generation, with 10 ns programmable resolution (10V peak-peak output)

High-speed voltage/current measurement (200 MSa/s, 5ns sampling rate)

The dynamic range of any waveform output can be adjusted to achieve a wider current range

Dual channel output

describe

It is the latest high speed SMU technology designed by teck technology, which can get rid of the influence of line load effect and conduct more accurate pulse and transient measurement

Ultra-fast IV, pulse IV, and transient IV measurements are becoming a common requirement in the development of next-generation semiconductors, devices, and materials. The Keysight B1530A waveform generator/rapid measurement unit (WGFMU) in the Keysight B1500A series is an ideal measurement module for the above time-dependent measurements. These measurements are usually performed by a pulse generator and an oscilloscope, but line load effects (voltage drop errors due to residual resistance) can adversely affect measurement accuracy. B1530A WGFMU combines the ability to generate arbitrary waveforms and simultaneously perform high-speed measurements. However, the dynamic SMU technology, which is unique to DE tech, can eliminate the line load effect. Therefore, compared with the pulse-based solution, it enables users to perform more accurate and sensitive measurements. This solution is powerful enough to perform high-precision, ultra-fast IV measurements, pulse IV measurements, and transient IV measurements, such as ultra-fast NBTI and RTN measurements.